利用360B和37XXXA B系列矢量网络分析仪进行晶圆测量

<p><font face="Verdana">利用360B和37XXXA B系列矢量网络分析仪进行晶圆测量</font><br/></p><font face="Verdana">On-wafer measurements are becoming increasingly important<br/>in the microwave industry. Modern MMIC designs have<br/>opened the way to cost reduction and industry expansion in<br/>both military and commercial applications. The Anritsu 360B<br/>and 37XXXA/B series Vector Network Analyzers are used to<br/>make accurate, high-speed on-wafer measurements in both<br/>R&amp;D and production environments. Rather than relying on<br/>models based upon low frequency measurements, the 360B<br/>VNA permits actual measurement of MMIC peRFormance and<br/>accurate characterization of active and passive on-wafer<br/>components to 110 GHz. This application note addresses the<br/>specIFics of such applications and how the Anritsu VNAs may<br/>be used to obtain accurate measurement results.</font>
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