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利用360B和37XXXA B系列矢量网络分析仪进行晶圆测量 in the microwave industry. Modern MMIC designs have opened the way to cost reduction and industry expansion in both military and commercial applications. The Anritsu 360B and 37XXXA/B series Vector Network Analyzers are used to make accurate, high-speed on-wafer measurements in both R&D and production environments. Rather than relying on models based upon low frequency measurements, the 360B VNA permits actual measurement of MMIC performance and accurate characterization of active and passive on-wafer components to 110 GHz. This application note addresses the specifics of such applications and how the Anritsu VNAs may be used to obtain accurate measurement results.
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